Slot Valve
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Valve Outside
Size Table
| Fitting Standard | SEMI E21.1-1296 | |
|---|---|---|
| Gate Size (mm) | 50mm x 336mm | |
| Pressure Range | 1.0xE-7Pa ~ 1.2xE5 Pa | |
| Helium Leak Rate | External | <1.0xE-10 Pa*㎥/sec |
| Internal | <1.0xE-10 Pa*㎥/sec | |
| Feed Through | Welded Bellows | |
| Pneumatic Actuator Type | Double acting | |
| Air Connection | Ø6,Speed Controller | |
| Air Pressure | 0.5MPa(Tolerance level : 0.45 ~ 0.6 MPa) | |
| Air Less Lock | Open | N/A |
| Close | Lock | |
| Life Cycles | Mechanism | 3,000,000 |
| Bellows | 3,000,000 | |
| O-Ring(Seal) | 1,000,000 | |
| lubrication | 1,000,000 | |
| Temperature | Body | ≤120 °C |
| Actuator | ≤60 °C | |
| Lubrication | Vacuum inside | Non lubrication |
| Mechanism | PFPE Grease | |
| Materials | Valve Body | AL6061 |
| Gate(Blade) | AL6061 | |
| Seal Plate(Bonnet) | AL6061 | |
| Shaft(stem) | STS304 | |
| Welded Bellows | AM350 | |
| Bellowsend Piece | STS304 | |
| Mechanism(Cylinder) | AL6061,STB2,POM | |
| Gate seal | FKM | |
| Vacuum seal | FKM | |
| Pneumatic seal | NBR | |
| Surface Treatment | Valve Body | Bare |
| Gate(Blade) | Bare | |
회사명 : 프리시스(주) 주소 : 경기도 수원시 권선구 서부로 1433-64 대표 : 서진천
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