Bidirectional Gate Valve
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Valve Outside
Size Table
| Fitting Standard | SEMI E21.1-1296 | ||
|---|---|---|---|
| Gate Size (mm) | 50mm x 336mm | ||
| Pressure Range | 1.0xE-4Pa ~ 1.2xE5 Pa (abs) | ||
| Helium Leak Rate | TM Valve | External | < 1.0xE-8 Pa*㎥/sec |
| Internal | < 1.0xE-8 Pa*㎥/sec | ||
| L/L Valve | External | < 1.0xE-8 Pa*㎥/sec | |
| Internal | < 1.0xE-8 Pa*㎥/sec | ||
| Feed Through | TM Valve, L/L Valve | Welded Bellows Seal | |
| Pneumatic Actuator Type | Double Acting | ||
| Air Connection | OD Ø6 / one-touch type / Speed Controller (Meter-out) | ||
| Air Pressure | 0.5 MPa (Tolerance level : 0.45 ~ 0.6 MPa) | ||
| Air Less Lock | Open | N/A | |
| Close | Lock | ||
| Life Cycles | TM VALVE | 3,000,000 | |
| PM VALVE | 3,000,000 | ||
| Temperature | Housing | ≤ 120℃ | |
| Actuator | ≤ 60℃ | ||
| Lubrication | Vacuum inside | Non lubrication | |
| Mechanism | PFPE Grease | ||
| Air Cylinder | PAO Grease | ||
| Materials | Valve Housing | AL 6061 | |
| Housing Seal | TM Side | FFKM | |
| L/L Side | FFKM | ||
| Gate (Seat) | AL 6061 | ||
| Bonnet | AL 6061 | ||
| Shaft(stem) | STS 304 | ||
| Bellows | AM350 | ||
| Bellows End Piece | STS 316L | ||
| Gate Seal | TM Valve | FKM(F-972) | |
| L/L Valve | FFKM(Kalrez 8575) | ||
| Vacuum Seal | FKM(F-972) | ||
| Pneumatic Seal | FKM(F-972) | ||
| Surface Treatment | Valve Housing | Anodizing O-Ring Groove & Seal Surface (Bare) |
|
| Gate (Seat) | Anodizing O-Ring Groove & Seal Surface (Bare) |
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