Door Valve
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Valve Outside
Size Table
| Fitting Standard | SEMI E21.1-1296 | |
|---|---|---|
| Gate Size (mm) | 50mm x 336mm | |
| Pressure Range | 1.0 X E-7 ~ 1.0 X E5 Pa (abs) | |
| Helium Leak Rate | External | N/A |
| Internal | <1.0X E-10 Pa*㎥/sec | |
| Feed Through | Welded bellows | |
| Pneumatic Actuator Type | Double acting | |
| Air Connection | ODØ6 / one-touch type / Speed Controller (Meter-out) | |
| Air Pressure | 0.5MPa(Tolerance level : 0.45 ~ 0.6 MPa) | |
| Air Less Lock | Open | N/A |
| Close | Lock | |
| Life Cycles | Mechanism | 3,000,000 |
| Bellows | 3,000,000 | |
| O-Ring(Seal) | 1,000,000 | |
| Lubrication | 1,000,000 | |
| Temperature | Valve Body | <150℃ |
| Actuator | <80℃ | |
| Lubrication | Vacuum Inside | Non lubrication |
| Mechanism | PFPE Grease | |
| Air Cylinder | PAO Grease | |
| Materials | Valve Housing | N/A |
| Gate(Seat) | AL6061 | |
| Bonnet | AL6061 | |
| Shaft(Stem) | STS304 | |
| Bellows | AM350 | |
| Bellows End Piece | STS304 | |
| Gate seal | FKM | |
| Bonnet Seal | N/A | |
| Vacuum seal | N/A | |
| Pneumatic Seal | FKM | |
| Surface Treatment | Valve Housing | N/A |
| Gate(Seat) | Bare | |
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